- Purifier Chamber : 80m×120mm×2.5t
- Ultimate Vacuum : ≤3E-6Torr
- Heating 제어온도 : Max. 600℃
- Inner Tuber & Boat : Quartz(60 ~ 300mm)
- Trap, MFC, Turbo Pump, Glove Box
- Capacity : max 10g
- Yield : 80 ~ 85%
- Heater : Ta Filament AI203 Mold
- Heating Insulation : Ceramic Zone